CLARUS™ Optics DLC System

Fully-automated PECVD coating platform
for DLC and more

When you need highly durable DLC

Our CLARUS™ is a high-performance, fully-automated PECVD coating platform for DLC, infrared anti-reflective coating, and other PECVD applications.

Its coatings provide excellent chemical and wear resistance, passing MIL-F-48616 / MIL-C-48497C.

Examples of substrate materials: Si, Ge, II-VI compounds, optical glasses, chalcogenides, sapphire, metals, and plastics.

Special advantages:

  • Higher capacity: With Ø585mm diameter, CLARUS’s capacity is among the largest in the field. It can hold substrates of virtually any shape or geometry, up to 550mm diameter and 70-80mm height for single substrates. Or it can give larger throughputs of smaller parts with a batch time of ~1h.
  • Cooler deposition temperature (<60°C) limits exposure to hot substrates and also reduces coating stress and flaking when coating, seed layer, and substrate have a thermal expansion mismatch.
  • Special self-clean feature allows each batch to produce consistently uniform films up to several microns thick on a variety of substrates with little to no run-to-run variation.
  • Excellent uniformity: CLARUS is 100% symmetrical in design and build, which produces higher uniformity. Whereas other DLC tools have pump port and plasma charge port offset, this system has both centered.
  • Excellent layer control is the most important factor in achieving high yield. Over two decades of DLC deposition experience on high-value semiconductor pedestals has led us to design our own special layer control software and PIDs. This guarantees that each step of the process transition is executed in a smooth, controlled, and effective way – and each product run is copy-exact.
  • Small footprint of 1500mm [59″] x 1200mm [48″] requires little space. No 19-inch rack needs to be installed, and no cables to be running across the floor. All components are integrated within a single chassis keeping the floor and work environment cleaner – for yield improvement. Also, the entire tool rolls on casters for easy repositioning whenever needed.
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