OMNIA™ Semiconductor Coater

DLC, DLN, and PVD – all together

High-performance semiconductor coating

The OMNIA pedestal-wafer contact surface system offers a comprehensive, reliable solution to increase wafer-to-pedestal interface performance – to reduce particle formation, improve electrical properties and thermal conductivity, protect against corrosion, and resist wear.

It can extend pedestal lifetime by 4x compared with TiN alternatives.

Special advantages:

  • Lower Cost of Ownership: And longer lifetime.
  • Cleaner performance: Reduced particle generation for cleaner, higher-perming films.
  • Fully-automated system: Automation combined with a sophisticated graphic user interface allows for nightly ghost runs with the push of a single button.
  • High current ION and PVD: Addresses the needs for high current ION pedestals and PVD Minimum Contact Angle (MCA) electrostatic chucks.
  • Multiple application processes: Supports both Coulomb and Johnsen Rahbek (JR) processes.
  • Flexibility and ease of use: Proprietary TOPS GUI interface with attractive graphics and full data logging capabilities.
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